Hydrogenated amorphous silicon prepared by d.c. plasma enhanced chemical vapour deposition of helium diluted silane / Roszairi Haron

Haron, Roszairi (2004) Hydrogenated amorphous silicon prepared by d.c. plasma enhanced chemical vapour deposition of helium diluted silane / Roszairi Haron. Masters thesis, University of Malaya. .

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                      Item Type: Thesis (Masters)
                      Additional Information: Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2004.
                      Uncontrolled Keywords: Plasma-enhanced chemical vapor deposition.; Amorphous semiconductors--Optical properties.; Amorphous semiconductors--Electric properties.
                      Subjects: Q Science > QC Physics
                      Divisions: Faculty of Science
                      Depositing User: Puan Norashikin Ismail
                      Date Deposited: 13 Apr 2012 09:24
                      Last Modified: 13 Jul 2013 12:46
                      URI: http://studentsrepo.um.edu.my/id/eprint/1613

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