Othman, Raihan (1998) Hydrogenated silicon nitride alloy from DC plasma decomposition : preparation and physical properties / Raihan bin Othman. Masters thesis, University of Malaya. .
![[img]](http://studentsrepo.um.edu.my/style/images/fileicons/application_pdf.png)
| PDF (PENDAHULUAN) Download (4Mb) | Preview | |
| PDF (KANDUNGAN) Download (1328Kb) | Preview | |
| PDF (ABSTRACT) Download (2279Kb) | Preview | |
| PDF (BAB 1) Download (1965Kb) | Preview | |
| PDF (BAB 2) Download (23Mb) | Preview | |
| PDF (BAB 3) Download (10Mb) | Preview | |
| PDF (BAB 4) Download (29Mb) | Preview | |
| PDF (BAB 5) Download (21Mb) | Preview | |
| PDF (BAB 6) Download (3548Kb) | Preview | |
| PDF (LAMPIRAN) Download (5Mb) | Preview |
Official URL: http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01...
| Item Type: | Thesis (Masters) |
|---|---|
| Additional Information: | Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 1998. |
| Uncontrolled Keywords: | Plasma-enhanced chemical vapor deposition.; Silicon alloys.; Thin films. |
| Subjects: | T Technology > TS Manufactures |
| Divisions: | Faculty of Science |
| Depositing User: | Puan Norashikin Ismail |
| Date Deposited: | 14 Apr 2012 17:37 |
| Last Modified: | 27 Jul 2013 11:18 |
| URI: | http://studentsrepo.um.edu.my/id/eprint/1621 |
Actions (For repository staff only : Login required)
| View Item |
