Liew, Wai Soon (2001) Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon. Masters thesis, University of Malaya .
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Official URL: http://www.pendeta.um.edu.my/uhtbin/cgisirsi/x/P01...
Item Type: | Thesis (Masters) |
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Additional Information: | Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2001. |
Uncontrolled Keywords: | Physics |
Subjects: | Q Science > QC Physics |
Divisions: | Faculty of Science |
Depositing User: | Mr Mohd Faizal Hamzah |
Date Deposited: | 18 Apr 2012 17:53 |
Last Modified: | 08 Oct 2014 21:07 |
URI: | http://studentsrepo.um.edu.my/id/eprint/2891 |
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