Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon

Liew, Wai Soon (2001) Diamondlike carbon thin film deposition using a RF planar coil inductively coupled plasma system / Liew Wai Soon. Masters thesis, University of Malaya .

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                    Item Type: Thesis (Masters)
                    Additional Information: Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2001.
                    Uncontrolled Keywords: Physics
                    Subjects: Q Science > QC Physics
                    Divisions: Faculty of Science
                    Depositing User: Mr Mohd Faizal Hamzah
                    Date Deposited: 18 Apr 2012 17:53
                    Last Modified: 08 Oct 2014 21:07
                    URI: http://studentsrepo.um.edu.my/id/eprint/2891

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