Characterization of an inductively coupled plasma produced in argon at 13.56 MHz / Lim Ai Nuan

Lim, Ai Nuan (2010) Characterization of an inductively coupled plasma produced in argon at 13.56 MHz / Lim Ai Nuan. Masters thesis, University of Malaya.

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    The electrical and plasma characteristics of radio frequency (13.56 MHz) inductively coupled argon plasma (RF ICP) were studied in this project. On the electrical breakdown properties, the breakdown voltage has a general appearance of Paschen’s curve and the minimum is achieved at 0.1 mbar. After ignition, two modes of discharge exist, namely, the E mode at low RF power and H mode at high RF power. Mode transition that occurs is accompanied by abrupt changes in both electrical and plasma characteristics. Hysteresis is observed in the mode transitions and has a minimum at 0.1 mbar. The resistance reflected into the electrical circuit due to H mode plasma is 9.8 times higher when compared to E mode (Rp= 0.10±0.01) Ω. Therefore, the impedance matching scheme used is most efficient at E mode where the antenna coil resistance Ra is (1.12±0.01) Ω. Ra doubles in the H mode. However, the transfer of power is more efficient in the H mode. This efficiency is reflected in the much higher electron density of ne = (3.6−12.2)×1017 m−3 measured in the H mode at 0.10±0.1 mbar. Consequently, the increased electron collisions tend to lower the electron temperature Te in the H mode (1.7−2.0 eV) as compared to that in E mode (Te = 2.3-2.8 eV). The measured electron energy distribution function EEDF in H mode is inclined towards Maxwellian-type especially at 200 W. From the radial distribution of plasma properties, it is deduced that E mode discharge is relatively more uniform and diffuse.

    Item Type: Thesis (Masters)
    Additional Information: Dissertation (M.Sc.) -- Jabatan Fizik, Fakulti Sains, Universiti Malaya, 2010
    Uncontrolled Keywords: Inductively coupled plasma mass spectrometry; Argon plasmas; Plasma probes; Plasma frequencies; Langmuir probes
    Subjects: Q Science > Q Science (General)
    Q Science > QC Physics
    Divisions: Faculty of Science
    Depositing User: Miss Dashini Harikrishnan
    Date Deposited: 25 Sep 2014 16:56
    Last Modified: 25 Sep 2014 16:56

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